Regress Pro 1.1 review
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Regress Pro is scientific/industrial software that can be used to study experimental data coming from spectroscopic ellipsometers or reflectometers.
Regress Pro has been developed mainly for the application of thin film measurement in the semiconductor industry.
The software is suitable both to determine the thickness of the layers and to determine the optical properties of dielectric materials.
Requirements:
GNU Scientific Library, version 1.7
FOX toolkit library, a recent version of the 1.4 branch (at least 1.4.33)
What's New in This Release:
Support for psi-delta ellipsometric spectra has been added.
Now Regress Pro is able to read spectra in psi-delta format, and able to fit them according to the defined fit strategy.
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